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Study of Oxygen and Carbon Species on Si Substrate DUring In-Situ Cleaning Prior to High-Quality Epitaxial Deposition
Study of Oxygen and Carbon Species on Si Substrate DUring In-Situ Cleaning Prior to High-Quality Epitaxial Deposition
Hyoun-Woo Kim,Kwang-Sik Kim, | 대한금속.재료학회 | 2002 ,
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1
Convention on International Trade in Endangered Species of Wild Fauna & Flora
Great Neck Publishing [, ]
2
Mammalian Species
Alliance Communications Group [, ]
3
Plant Species Biology
Blackwell Publishing Limited [, ]