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The Effects of Vacuum Annealing on the Film Properties of Titanium Boride (TiBx) Grown on (100)Si Substrate
The Effects of Vacuum Annealing on the Film Properties of Titanium Boride (TiBx) Grown on (100)Si Substrate
Young-Ki Lee,Jung-Yuel Kim,You-Kee Lee, | 대한금속.재료학회 | 2001 ,
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