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Growth and Characterizationof Al₂O₃Thin Films for the Buffer Insulator in Pt/SrBi₂Nb₂O0/Al₂O₃/Si Ferroelectric Gate Oxide Structure
Growth and Characterizationof Al₂O₃Thin Films for the Buffer Insulator in Pt/SrBi₂Nb₂O0/Al₂O₃/Si Ferroelectric Gate Oxide Structure
Hoon Sang Choi,Geun-Sik Lim,Jong Han Lee, | 대한금속.재료학회 | 2003 ,
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