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31
Self Displacement Sensing (SDS) Nano Stage
Self Displacement Sensing (SDS) Nano Stage
Soo Chang Choi, | 한국정밀공학회 | 2007 ,
32
Estimation of 2D Position and Flatness Errors for a Planar XY Stage Based on Measured Guideway Profiles
Estimation of 2D Position and Flatness Errors for a Planar XY Stage Based on Measured Guideway Profiles
Jooho Hwang, | 한국정밀공학회 | 2007 ,
33
An Integrated Approach to the Analysis and Design of a Three-Axis Cross-Coupling Control System
An Integrated Approach to the Analysis and Design of a Three-Axis Cross-Coupling Control System
Sungchul Jee, | 한국정밀공학회 | 2007 ,
34
An AFM-based Edge Profile Measuring Instrument for Diamond Cutting Tools
An AFM-based Edge Profile Measuring Instrument for Diamond Cutting Tools
Takemi Asai, | 한국정밀공학회 | 2007 ,
35
Nanometric Positioning Over a One-Millimeter Stroke Using a Flexure Guide and Electromagnetic Linear Motor
Nanometric Positioning Over a One-Millimeter Stroke Using a Flexure Guide and Electromagnetic Linear Motor
Shigeo Fukada, | 한국정밀공학회 | 2007 ,
36
Non-contact Transportation of Flat Panel Substrate by Combined Ultrasonic Acoustic Viscous and Aerostatic Forces
Non-contact Transportation of Flat Panel Substrate by Combined Ultrasonic Acoustic Viscous and Aerostatic Forces
Hiromi ISOBE, | 한국정밀공학회 | 2007 ,
37
Ultrasonically Assisted Grinding for Mirror Surface Finishing of Dies with Electroplated Diamond Tools
Ultrasonically Assisted Grinding for Mirror Surface Finishing of Dies with Electroplated Diamond Tools
Hiromi Isobe, | 한국정밀공학회 | 2007 ,
38
A Dual-mode Pico-positioning System using Active Aerostatic Coupling
A Dual-mode Pico-positioning System using Active Aerostatic Coupling
Hiroshi Mizumoto, | 한국정밀공학회 | 2007 ,
39
Profile Measurements of Micro-aspheric Surfaces Using an Air-bearing Stylus with a Microprobe
Profile Measurements of Micro-aspheric Surfaces Using an Air-bearing Stylus with a Microprobe
Atsushi Shibuya, | 한국정밀공학회 | 2007 ,
40
Design and Construction of a Surface Encoder with Dual Sine-Grids
Design and Construction of a Surface Encoder with Dual Sine-Grids
Akihide Kimura, | 한국정밀공학회 | 2007 ,
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