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21
Contour Offset Algorithm (COA) in Nano Replication Printing (nRP) for Fabricating Nano-Precision Features
Contour Offset Algorithm (COA) in Nano Replication Printing (nRP) for Fabricating Nano-Precision Features
Tae Woo Lim, Sang Hu Park, Dong-Yol Yang, Shin Wo, | 대한기계학회 | 2005 ,
22
Improvement of Rounding Effect in Chemical Mechanical Polishing Process for Nano-Scale Manufacturing
Improvement of Rounding Effect in Chemical Mechanical Polishing Process for Nano-Scale Manufacturing
Tae Woo Lim, Sang Hu Park, Dong-Yol Yang, Shin Wo, | 대한기계학회 | 2005 ,
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