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11
A Dual-mode Pico-positioning System using Active Aerostatic Coupling
A Dual-mode Pico-positioning System using Active Aerostatic Coupling
Hiroshi Mizumoto, | 한국정밀공학회 | 2007 ,
12
Profile Measurements of Micro-aspheric Surfaces Using an Air-bearing Stylus with a Microprobe
Profile Measurements of Micro-aspheric Surfaces Using an Air-bearing Stylus with a Microprobe
Atsushi Shibuya, | 한국정밀공학회 | 2007 ,
13
Design and Construction of a Surface Encoder with Dual Sine-Grids
Design and Construction of a Surface Encoder with Dual Sine-Grids
Akihide Kimura, | 한국정밀공학회 | 2007 ,
14
A Single Lens Micro-Angle Sensor
A Single Lens Micro-Angle Sensor
Yusuke Saito, | 한국정밀공학회 | 2007 ,
15
An Open-Loop Method for Point-to-Point Positioning of a Piezoelectric Actuator
An Open-Loop Method for Point-to-Point Positioning of a Piezoelectric Actuator
Nobuhiko Henmi, | 한국정밀공학회 | 2007 ,
16
An Ultraprecise Machining System with a Hexapod Device to Measure Six-Degree-Of-Freedom Relative Motions Between The Tool And Workpiece
An Ultraprecise Machining System with a Hexapod Device to Measure Six-Degree-Of-Freedom Relative Motions Between The Tool And Workpiece
Takaaki Oiwa, | 한국정밀공학회 | 2007 ,
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