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1 Results:UU:VOLUME5NUMBER12005 PP:대한전자공학회 AA:ILLHWAN KIM 0.46 sec.
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Wafer Level Vacuum Packaged Out-of-Plane and In-Plane Differential Resonant Silicon Accelerometers for Navigational Applications
Wafer Level Vacuum Packaged Out-of-Plane and In-Plane Differential Resonant Silicon Accelerometers for Navigational Applications
Illhwan Kim, | 대한전자공학회 | 2005 ,
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