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Mask Error Enhancement Factor Variation with Pattern Density for 65 nm and 90 nm Line Widths
Mask Error Enhancement Factor Variation with Pattern Density for 65 nm and 90 nm Line Widths
Kang, Hye-young, | 한국물리학회 | 2006 ,
2
A method for effective beam widths of slabs in flat plate structures under gravity and lateral loads
A method for effective beam widths of slabs in flat plate structures under gravity and lateral loads
Jung-Wook Choi, Jin-Gyu Song, | 국제구조공학회(TECNO-PRESS) | 2005 ,
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