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Atomic Layer Deposition of Ultrathin Metal-Oxide Films for Nano-Scale Device Applications
Atomic Layer Deposition of Ultrathin Metal-Oxide Films for Nano-Scale Device Applications
Kim, Hyongsub, | 한국물리학회 | 2006 ,
2
Nano-Mechanical and Tribological Characteristics of Ultra-Thin Amorphous Carbon Film Investigated by AFM
Nano-Mechanical and Tribological Characteristics of Ultra-Thin Amorphous Carbon Film Investigated by AFM
Koo-Hyun Chung, Jae-Won Lee, Dae-Eun Kim, | 대한기계학회 | 2004 ,
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