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Improving Sensitivity of SAW-based Pressure Sensor with Metal Ground Shielding over Cavity
Improving Sensitivity of SAW-based Pressure Sensor with Metal Ground Shielding over Cavity
Keekeun Lee, Jeangsu Hwang, Wen Wang, Geunyoung K, | 한국마이크로전자및 패키징학회 | 2005 ,
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