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1
Dishing and erosion evaluations of tungsten CMP slurry in the orbital polishing system
Dishing and erosion evaluations of tungsten CMP slurry in the orbital polishing system
Lee, Sang-Ho, | 한국전기전자재료학회 | 2007 ,
2
An Orbital Design Method for Satellite Formation Flying
An Orbital Design Method for Satellite Formation Flying
Hai-Ying Cui, Jun-Feng Li, Yun Feng Gao, | 대한기계학회 | 2006 ,
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