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The Effect of Hydrogen Plasma on Surface Roughness and Activation in SOI Wafer Fabrication
The Effect of Hydrogen Plasma on Surface Roughness and Activation in SOI Wafer Fabrication
Woo Beom Choi, | 한국전기전자재료학회 | 2001 ,
2
Regular Paper : A New SOI LIGBT Structure with Improved Latch - Up Performance
Regular Paper : A New SOI LIGBT Structure with Improved Latch - Up Performance
Woong Je Sung, | 한국전기전자재료학회 | 2002 ,
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