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Use of Neural Network to Characterize Temperature Effects on Deposition Rate of PECVD-silicon Nitride Thin Films
Use of Neural Network to Characterize Temperature Effects on Deposition Rate of PECVD-silicon Nitride Thin Films
Byungwhan Kim, | 한국물리학회 | 2006 ,
2
Prediction of Etch Profile Uniformity Using Wavelet and Neural Network
Prediction of Etch Profile Uniformity Using Wavelet and Neural Network
Won Sun Choi, Myo Taeg Lim, Byungwhan Kim, | The Korean Institute of Electrical Eng. | 2004 ,
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