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Design of feedforward filters for improving tracking performances of existing feedback control systems
Design of feedforward filters for improving tracking performances of existing feedback control systems
Kuen-Yu Tsai, | Institute of Electrical and Electronics Engineers | 2004 ,
2
Programmable thermal processing module for semiconductor substrates
Programmable thermal processing module for semiconductor substrates
Khalid El-Awady, | Institute of Electrical and Electronics Engineers | 2004 ,
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