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1
The Influence of Transmission Reduction by Mask Haze Formation in ArF Lithography
The Influence of Transmission Reduction by Mask Haze Formation in ArF Lithography
Sung-jin Kim., | 한국물리학회 | 2006 ,
2
Evaluation of Partial Coherent Imaging Using the Modulation Transfer Function in Immersion Lithography
Evaluation of Partial Coherent Imaging Using the Modulation Transfer Function in Immersion Lithography
Mi-rim Jung., | 한국물리학회 | 2006 ,
3
Nanoscale Lines Patterned by 1 : 1 Electron-Beam Projection Lithography Using an Electron Emission Mask
Nanoscale Lines Patterned by 1 : 1 Electron-Beam Projection Lithography Using an Electron Emission Mask
Kwang Nam Choi., | 한국물리학회 | 2006 ,
4
Electrochemical DNA Biosensor with Nanometer Scale Using Nano-Patterning Lithography Machine
Electrochemical DNA Biosensor with Nanometer Scale Using Nano-Patterning Lithography Machine
Seung Woo Lee, Soo Yeon Park, JaeJong Lee, | 대한기계학회 | 2005 ,
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1
Microlithography World
Penn Well Publishing Co. [, ]