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Optimal pulse shaping for plasma processing
Optimal pulse shaping for plasma processing / Tyrone L. Vincent ; Laxminarayan L. Raja
Optimal pulse shaping for plasma processing

Detailed Information

Material Type  
 기사
ISSN  
10636536
Author  
Tyrone L. Vincent
Title/Author  
Optimal pulse shaping for plasma processing / Tyrone L. Vincent ; Laxminarayan L. Raja
Publish Info  
New York, NY : Institute of Electrical and Electronics Engineers, 2004.
Material Info  
pp. 75-86
General Note  
Indudes Bibiography Reference
Added Entry-Personal Name  
Laxminarayan L. Raja
Host Item Entry  
IEEE transactions on control systems technology : Vol. 12 No. 1 (2004. 1) 2004, 01
Electronic Location and Access  
 url
모체레코드  
모체정보확인
Control Number  
kjul:60263373

MARC

 008201016s2004        ai                            aa    eng
■022    ▼a10636536
■1001  ▼aTyrone  L.  Vincent
■24510▼aOptimal  pulse  shaping  for  plasma  processing▼dTyrone  L.  Vincent▼eLaxminarayan  L.  Raja
■260    ▼aNew  York,  NY▼bInstitute  of  Electrical  and  Electronics  Engineers▼c2004.
■300    ▼app.  75-86
■500    ▼aIndudes  Bibiography  Reference
■7001  ▼aLaxminarayan  L.  Raja
■773    ▼tIEEE  transactions  on  control  systems  technology▼gVol.  12  No.  1  (2004.  1)▼d2004,  01
■856    ▼uhttps://www.ieee.org
■SIS    ▼aS029536▼b60077650▼h8▼s2▼fP

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