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Control of a III-V MOCVD process using ultraviolet absorption and ultrasonic concentration monitoring
Control of a III-V MOCVD process using ultraviolet absorption and ultrasonic concentration monitoring
Detailed Information
- 자료유형
- 기사
- ISSN
- 10636536
- 저자명
- M. Gaffney Flynn
- 서명/저자
- Control of a III-V MOCVD process using ultraviolet absorption and ultrasonic concentration monitoring / M. Gaffney Flynn , Roy S. Smith, Patrick Abraham, Steven DenBaars
- 발행사항
- New York, NY : Institute of Electrical and Electronics Engineers, 2001.
- 형태사항
- pp. 728-740
- 주기사항
- Indudes Bibiography Reference
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60263233
MARC
008201016s2001 ai aa eng■022 ▼a10636536
■1001 ▼aM. Gaffney Flynn
■24510▼aControl of a III-V MOCVD process using ultraviolet absorption and ultrasonic concentration monitoring▼dM. Gaffney Flynn▼eRoy S. Smith, Patrick Abraham, Steven DenBaars
■260 ▼aNew York, NY▼bInstitute of Electrical and Electronics Engineers▼c2001.
■300 ▼app. 728-740
■500 ▼aIndudes Bibiography Reference
■7001 ▼aRoy S. Smith, Patrick Abraham, Steven DenBaars
■773 ▼tIEEE transactions on control systems technology▼gVol. 9 No. 5 (2001. 9)▼d2001, 09
■856 ▼uhttps://www.ieee.org
■SIS ▼aS029522▼b60077650▼h8▼s2▼fP
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