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Control of a III-V MOCVD process using ultraviolet absorption and ultrasonic concentration monitoring
Control of a III-V MOCVD process using ultraviolet absorption and ultrasonic concentration monitoring
Detailed Information
- Material Type
- 기사
- ISSN
- 10636536
- Author
- M. Gaffney Flynn
- Title/Author
- Control of a III-V MOCVD process using ultraviolet absorption and ultrasonic concentration monitoring / M. Gaffney Flynn ; Roy S. Smith, Patrick Abraham, Steven DenBaars
- Publish Info
- New York, NY : Institute of Electrical and Electronics Engineers, 2001.
- Material Info
- pp. 728-740
- General Note
- Indudes Bibiography Reference
- Added Entry-Personal Name
- Roy S. Smith, Patrick Abraham, Steven DenBaars
- Electronic Location and Access
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60263233
MARC
008201016s2001 ai aa eng■022 ▼a10636536
■1001 ▼aM. Gaffney Flynn
■24510▼aControl of a III-V MOCVD process using ultraviolet absorption and ultrasonic concentration monitoring▼dM. Gaffney Flynn▼eRoy S. Smith, Patrick Abraham, Steven DenBaars
■260 ▼aNew York, NY▼bInstitute of Electrical and Electronics Engineers▼c2001.
■300 ▼app. 728-740
■500 ▼aIndudes Bibiography Reference
■7001 ▼aRoy S. Smith, Patrick Abraham, Steven DenBaars
■773 ▼tIEEE transactions on control systems technology▼gVol. 9 No. 5 (2001. 9)▼d2001, 09
■856 ▼uhttps://www.ieee.org
■SIS ▼aS029522▼b60077650▼h8▼s2▼fP
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