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Multivariable feedback relevant system identification of a wafer stepper system
Multivariable feedback relevant system identification of a wafer stepper system
Detailed Information
- 자료유형
- 기사
- ISSN
- 10636536
- 서명/저자
- Multivariable feedback relevant system identification of a wafer stepper system / Raymond A. de Callafon , Paul M. J. Van den Hof
- 발행사항
- New York, NY : Institute of Electrical and Electronics Engineers, 2001.
- 형태사항
- pp. 381-390
- 주기사항
- Indudes Bibiography Reference
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60263179
MARC
008201016s2001 ai aa eng■022 ▼a10636536
■1001 ▼aRaymond A. de Callafon
■24510▼aMultivariable feedback relevant system identification of a wafer stepper system▼dRaymond A. de Callafon▼e Paul M. J. Van den Hof
■260 ▼aNew York, NY▼bInstitute of Electrical and Electronics Engineers▼c2001.
■300 ▼app. 381-390
■500 ▼aIndudes Bibiography Reference
■7001 ▼aPaul M. J. Van den Hof
■773 ▼tIEEE transactions on control systems technology▼gVol. 9 No. 2 (2001. 3)▼d2001, 03
■856 ▼uhttps://www.ieee.org
■SIS ▼aS029519▼b60077650▼h8▼s2▼fP
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