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A neural-network-based approach to determining a robust process recipe for the plasma-enhanced deposition of silicon nitride thin films
A neural-network-based approach to determining a robust process recipe for the plasma-enhanced deposition of silicon nitride thin films
Detailed Information
- Material Type
- 기사
- ISSN
- 10636536
- Author
- I. Gary Rosen
- Title/Author
- A neural-network-based approach to determining a robust process recipe for the plasma-enhanced deposition of silicon nitride thin films / I. Gary Rosen ; Tyler Parent, Carolyn Cooper, Ping Chen, Anupam Madhukar
- Publish Info
- New York, NY : Institute of Electrical and Electronics Engineers, 2001.
- Material Info
- pp. 271-284
- General Note
- Indudes Bibiography Reference
- Added Entry-Personal Name
- Tyler Parent, Carolyn Cooper, Ping Chen, Anupam Madhukar
- Electronic Location and Access
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60263167
MARC
008201016s2001 ai aa eng■022 ▼a10636536
■1001 ▼aI. Gary Rosen
■24510▼aA neural-network-based approach to determining a robust process recipe for the plasma-enhanced deposition of silicon nitride thin films▼dI. Gary Rosen▼eTyler Parent, Carolyn Cooper, Ping Chen, Anupam Madhukar
■260 ▼aNew York, NY▼bInstitute of Electrical and Electronics Engineers▼c2001.
■300 ▼app. 271-284
■500 ▼aIndudes Bibiography Reference
■7001 ▼aTyler Parent, Carolyn Cooper, Ping Chen, Anupam Madhukar
■773 ▼tIEEE transactions on control systems technology▼gVol. 9 No. 2 (2001. 3)▼d2001, 03
■856 ▼uhttps://www.ieee.org
■SIS ▼aS029519▼b60077650▼h8▼s2▼fP
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