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Iterative control of dynamics-coupling-caused errors in piezoscanners during high-speed AFM operation
Iterative control of dynamics-coupling-caused errors in piezoscanners during high-speed AFM operation
상세정보
- 자료유형
- 기사
- ISSN
- 10636536
- 저자명
- Szuchi Tien
- 서명/저자
- Iterative control of dynamics-coupling-caused errors in piezoscanners during high-speed AFM operation / Szuchi Tien , Qingze Zou, Santosh Devasia
- 발행사항
- New York, NY : Institute of Electrical and Electronics Engineers, 2005.
- 형태사항
- pp. 921-931
- 주기사항
- Indudes Bibiography Reference
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60263033
MARC
008201015s2005 ai aa eng■022 ▼a10636536
■1001 ▼aSzuchi Tien
■24510▼aIterative control of dynamics-coupling-caused errors in piezoscanners during high-speed AFM operation▼dSzuchi Tien▼eQingze Zou, Santosh Devasia
■260 ▼aNew York, NY▼bInstitute of Electrical and Electronics Engineers▼c2005.
■300 ▼app. 921-931
■500 ▼aIndudes Bibiography Reference
■7001 ▼aQingze Zou, Santosh Devasia
■773 ▼tIEEE transactions on control systems technology▼gVol. 13 No. 6 (2005. 11)▼d2005, 11
■SIS ▼aS029547▼b60077650▼h8▼s2▼fP
