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Fabrication of SOI FinFET Devices using Arsenic Solid-phase-diffusion
Fabrication of SOI FinFET Devices using Arsenic Solid-phase-diffusion
Detailed Information
- 자료유형
- 기사
- ISSN
- 12267945
- 저자명
- Won Ju Cho
- 서명/저자
- Fabrication of SOI FinFET Devices using Arsenic Solid-phase-diffusion / Won Ju Cho , Hyun Mo Koo , Woo Hyun Lee , Sang Mo Koo , Hong Bay Chung 공저
- 발행사항
- 서울 : 한국전기전자재료학회, 2007.
- 형태사항
- pp. 394-398
- 주기사항
- 참고문헌 수록
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60233485
MARC
008191004s2007 ulk aa kor■022 ▼a12267945
■1001 ▼aWon Ju Cho
■24510▼aFabrication of SOI FinFET Devices using Arsenic Solid-phase-diffusion▼dWon Ju Cho ▼eHyun Mo Koo , Woo Hyun Lee , Sang Mo Koo , Hong Bay Chung 공저
■260 ▼a서울▼b한국전기전자재료학회▼c2007.
■300 ▼app. 394-398
■500 ▼a참고문헌 수록
■7001 ▼aHyun Mo Koo , Woo Hyun Lee , Sang Mo Koo , Hong Bay Chung
■773 ▼t전기전자재료학회논문지(Journal of the korean Institute and Electronic▼g제20권 제5호 (2007년 5월)▼d2007, 05
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS039763▼b60055323▼h8▼s2▼fP
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