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The Electrical Improvement of PZT Thin Films Etched into CF4/(Cl2+Ar) Plasma
The Electrical Improvement of PZT Thin Films Etched into CF4/(Cl2+Ar) Plasma
Detailed Information
- 자료유형
- 기사
- ISSN
- 12297607
- 저자명
- Seong Mo Koo
- 서명/저자
- The Electrical Improvement of PZT Thin Films Etched into CF4/(Cl2+Ar) Plasma / Seong Mo Koo , Kyoung Tae Kim , Chang Il Kim
- 발행사항
- 서울 : 한국전기전자재료학회, 2005.
- 형태사항
- pp. 223-226
- 주기사항
- Includes Bibliography
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60232790
MARC
008190927s2005 ulk aa eng■022 ▼a12297607
■1001 ▼aSeong Mo Koo
■24510▼aThe Electrical Improvement of PZT Thin Films Etched into CF4/(Cl2+Ar) Plasma▼dSeong Mo Koo ▼e Kyoung Tae Kim , Chang Il Kim
■260 ▼a서울▼b한국전기전자재료학회▼c2005.
■300 ▼app. 223-226
■500 ▼aIncludes Bibliography
■7001 ▼aKyoung Tae Kim , Chang Il Kim
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.5, No.6 (2004 December)▼d2005, 12
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS014511▼b60055341▼h8▼s2▼fP
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