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Investigation of the Alignment Phenomena on the a-C:H Thin Films by PECVD System using Ion-beam Alignment Method
Investigation of the Alignment Phenomena on the a-C:H Thin Films by PECVD System using Ion-beam Alignment Method
Detailed Information
- Material Type
- 기사
- ISSN
- 12297607
- Author
- Chang Joon Park
- Title/Author
- Investigation of the Alignment Phenomena on the a-C:H Thin Films by PECVD System using Ion-beam Alignment Method / Chang Joon Park ; Jeoung Yeon Hwang , Dae Shik Seo , Han Jin Ahn , Kyung Chan Kim , Hong Koo Baik
- Publish Info
- 서울 : 한국전기전자재료학회, 2005.
- Material Info
- pp. 15-18
- General Note
- Includes Bibliography
- Added Entry-Personal Name
- Jeoung Yeon Hwang , Dae Shik Seo , Han Jin Ahn , Kyung Chan Kim , Hong Koo Baik
- Host Item Entry
- Transactions on Electrical and Electronic Materials : Vol.5, No.1 (2004 February) 2005, 02
- Electronic Location and Access
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60232746
MARC
008190927s2005 ulk aa eng■022 ▼a12297607
■1001 ▼aChang Joon Park
■24510▼aInvestigation of the Alignment Phenomena on the a-C:H Thin Films by PECVD System using Ion-beam Alignment Method▼dChang Joon Park ▼eJeoung Yeon Hwang , Dae Shik Seo , Han Jin Ahn , Kyung Chan Kim , Hong Koo Baik
■260 ▼a서울▼b한국전기전자재료학회▼c2005.
■300 ▼app. 15-18
■500 ▼aIncludes Bibliography
■7001 ▼aJeoung Yeon Hwang , Dae Shik Seo , Han Jin Ahn , Kyung Chan Kim , Hong Koo Baik
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.5, No.1 (2004 February)▼d2005, 02
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS014506▼b60055341▼h8▼s2▼fP
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