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Simulation and Characteristic Measurement with Sputtering Conditions of Triode Magnetron Sputter
Simulation and Characteristic Measurement with Sputtering Conditions of Triode Magnetron Sputter
Detailed Information
- 자료유형
- 기사
- ISSN
- 12297607
- 저자명
- Hyun Hoo Kim
- 서명/저자
- Simulation and Characteristic Measurement with Sputtering Conditions of Triode Magnetron Sputter / Hyun Hoo Kim , Kee Joe Lim
- 발행사항
- 서울 : 한국전기전자재료학회, 2005.
- 형태사항
- pp. 11-14
- 주기사항
- Includes Bibliography
- 기타저자
- Kee Joe Lim
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60232745
MARC
008190927s2005 ulk aa eng■022 ▼a12297607
■1001 ▼aHyun Hoo Kim
■24510▼aSimulation and Characteristic Measurement with Sputtering Conditions of Triode Magnetron Sputter▼dHyun Hoo Kim ▼eKee Joe Lim
■260 ▼a서울▼b한국전기전자재료학회▼c2005.
■300 ▼app. 11-14
■500 ▼aIncludes Bibliography
■7001 ▼aKee Joe Lim
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.5, No.1 (2004 February)▼d2005, 02
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS014506▼b60055341▼h8▼s2▼fP
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