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A Study on the Corrosion Effects by Addition of Complexing Agent in the Copper CMP Process
A Study on the Corrosion Effects by Addition of Complexing Agent in the Copper CMP Process
Detailed Information
- Material Type
- 기사
- ISSN
- 12297607
- Author
- Sang Yong Kim
- Title/Author
- A Study on the Corrosion Effects by Addition of Complexing Agent in the Copper CMP Process / Sang Yong Kim ; Nam Hoon Kim , In Pyo Kim , Eui Goo Chang , Yong Jin Seo , Hun Sang Chung
- Publish Info
- 서울 : 한국전기전자재료학회, 2004.
- Material Info
- pp. 28-31
- General Note
- Includes Bibliography
- Added Entry-Personal Name
- Nam Hoon Kim , In Pyo Kim , Eui Goo Chang , Yong Jin Seo , Hun Sang Chung
- Host Item Entry
- Transactions on Electrical and Electronic Materials : Vol.4, No.6 (2003 December) 2004, 12
- Electronic Location and Access
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60232739
MARC
008190927s2004 ulk aa eng■022 ▼a12297607
■1001 ▼aSang Yong Kim
■24510▼aA Study on the Corrosion Effects by Addition of Complexing Agent in the Copper CMP Process▼dSang Yong Kim ▼eNam Hoon Kim , In Pyo Kim , Eui Goo Chang , Yong Jin Seo , Hun Sang Chung
■260 ▼a서울▼b한국전기전자재료학회▼c2004.
■300 ▼app. 28-31
■500 ▼aIncludes Bibliography
■7001 ▼aNam Hoon Kim , In Pyo Kim , Eui Goo Chang , Yong Jin Seo , Hun Sang Chung
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.4, No.6 (2003 December)▼d2004, 12
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS014505▼b60055341▼h8▼s2▼fP
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