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Anti-Reflection Properties of In-Situ Doped Spin-On Film
Anti-Reflection Properties of In-Situ Doped Spin-On Film
Detailed Information
- 자료유형
- 기사
- ISSN
- 12297607
- 저자명
- U. Gangopadhyay
- 서명/저자
- Anti-Reflection Properties of In-Situ Doped Spin-On Film / U. Gangopadhyay , Kyung Hae Kim , J. H. Park , S. K. Dhungel , D. Mangalaraj , J. Yi , H. Sa Ha , D. W. Kim
- 발행사항
- 서울 : 한국전기전자재료학회, 2004.
- 형태사항
- pp. 1-4
- 주기사항
- Includes Bibliography
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60232731
MARC
008190927s2004 ulk aa eng■022 ▼a12297607
■1001 ▼aU. Gangopadhyay
■24510▼aAnti-Reflection Properties of In-Situ Doped Spin-On Film▼dU. Gangopadhyay ▼e Kyung Hae Kim , J. H. Park , S. K. Dhungel , D. Mangalaraj , J. Yi , H. Sa Ha , D. W. Kim
■260 ▼a서울▼b한국전기전자재료학회▼c2004.
■300 ▼app. 1-4
■500 ▼aIncludes Bibliography
■7001 ▼aKyung Hae Kim , J. H. Park , S. K. Dhungel , D. Mangalaraj , J. Yi , H. Sa Ha , D. W. Kim
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.4, No.6 (2003 December)▼d2004, 12
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS014505▼b60055341▼h8▼s2▼fP
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