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A Study of Deposition Mechanism of Laser CVD SiO2 Film
A Study of Deposition Mechanism of Laser CVD SiO2 Film
Detailed Information
- 자료유형
- 기사
- ISSN
- 12297607
- 저자명
- Yung Kwon Sung
- 서명/저자
- A Study of Deposition Mechanism of Laser CVD SiO2 Film / Yung Kwon Sung , Jeong Myeon Song , Byung Moo Moon
- 발행사항
- 서울 : 한국전기전자재료학회, 2004.
- 형태사항
- pp. 33-37
- 주기사항
- Includes Bibliography
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60232727
MARC
008190927s2004 ulk aa eng■022 ▼a12297607
■1001 ▼aYung Kwon Sung
■24510▼aA Study of Deposition Mechanism of Laser CVD SiO2 Film▼d Yung Kwon Sung ▼eJeong Myeon Song , Byung Moo Moon
■260 ▼a서울▼b한국전기전자재료학회▼c2004.
■300 ▼app. 33-37
■500 ▼aIncludes Bibliography
■7001 ▼aJeong Myeon Song , Byung Moo Moon
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.4, No.5 (2003 October)▼d2004, 10
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS014504▼b60055341▼h8▼s2▼fP
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