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Structural Properties of Dielectric Barrier Reactor with Hole (DBH) for CF4 Decomposition
Structural Properties of Dielectric Barrier Reactor with Hole (DBH) for CF4 Decomposition
Detailed Information
- Material Type
- 기사
- ISSN
- 12297607
- Author
- Jung Gun Jung
- Title/Author
- Structural Properties of Dielectric Barrier Reactor with Hole (DBH) for CF4 Decomposition / Jung Gun Jung ; Jong Suk Kim , Jae Yoon Park , Kwang Soo Kim , Geun Hie Rim
- Publish Info
- 서울 : 한국전기전자재료학회, 2004.
- Material Info
- pp. 30-38
- General Note
- Includes Bibliography
- Added Entry-Personal Name
- Jong Suk Kim , Jae Yoon Park , Kwang Soo Kim , Geun Hie Rim
- Host Item Entry
- Transactions on Electrical and Electronic Materials : Vol.4, No.4 (2003 August) 2004, 08
- Electronic Location and Access
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60232718
MARC
008190927s2004 ulk aa eng■022 ▼a12297607
■1001 ▼aJung Gun Jung
■24510▼a Structural Properties of Dielectric Barrier Reactor with Hole (DBH) for CF4 Decomposition▼dJung Gun Jung ▼eJong Suk Kim , Jae Yoon Park , Kwang Soo Kim , Geun Hie Rim
■260 ▼a서울▼b한국전기전자재료학회▼c2004.
■300 ▼app. 30-38
■500 ▼aIncludes Bibliography
■7001 ▼aJong Suk Kim , Jae Yoon Park , Kwang Soo Kim , Geun Hie Rim
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.4, No.4 (2003 August)▼d2004, 08
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS014503▼b60055341▼h8▼s2▼fP
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