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Structural Properties of Dielectric Barrier Reactor with Hole (DBH) for CF4 Decomposition
Structural Properties of Dielectric Barrier Reactor with Hole (DBH) for CF4 Decomposition
상세정보
- 자료유형
- 기사
- ISSN
- 12297607
- 저자명
- Jung Gun Jung
- 서명/저자
- Structural Properties of Dielectric Barrier Reactor with Hole (DBH) for CF4 Decomposition / Jung Gun Jung , Jong Suk Kim , Jae Yoon Park , Kwang Soo Kim , Geun Hie Rim
- 발행사항
- 서울 : 한국전기전자재료학회, 2004.
- 형태사항
- pp. 30-38
- 주기사항
- Includes Bibliography
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60232718
MARC
008190927s2004 ulk aa eng■022 ▼a12297607
■1001 ▼aJung Gun Jung
■24510▼a Structural Properties of Dielectric Barrier Reactor with Hole (DBH) for CF4 Decomposition▼dJung Gun Jung ▼eJong Suk Kim , Jae Yoon Park , Kwang Soo Kim , Geun Hie Rim
■260 ▼a서울▼b한국전기전자재료학회▼c2004.
■300 ▼app. 30-38
■500 ▼aIncludes Bibliography
■7001 ▼aJong Suk Kim , Jae Yoon Park , Kwang Soo Kim , Geun Hie Rim
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.4, No.4 (2003 August)▼d2004, 08
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS014503▼b60055341▼h8▼s2▼fP
