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Al2O3 Nano-Coating by Atomic Layer Deposition
Al2O3 Nano-Coating by Atomic Layer Deposition
Detailed Information
- Material Type
- 기사
- ISSN
- 12297607
- Author
- Byung Don Min
- Title/Author
- Al2O3 Nano-Coating by Atomic Layer Deposition / Byung Don Min ; Jong Soo Lee , Sang Sig Kim
- Publish Info
- 서울 : 한국전기전자재료학회, 2004.
- Material Info
- pp. 15-18
- General Note
- Includes Bibliography
- Added Entry-Personal Name
- Jong Soo Lee , Sang Sig Kim
- Host Item Entry
- Transactions on Electrical and Electronic Materials : Vol.4, No.3 (2003 June) 2004, 06
- Electronic Location and Access
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60232702
MARC
008190927s2004 ulk aa eng■022 ▼a12297607
■1001 ▼aByung Don Min
■24510▼aAl2O3 Nano-Coating by Atomic Layer Deposition▼dByung Don Min ▼e Jong Soo Lee , Sang Sig Kim
■260 ▼a서울▼b한국전기전자재료학회▼c2004.
■300 ▼app. 15-18
■500 ▼aIncludes Bibliography
■7001 ▼aJong Soo Lee , Sang Sig Kim
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.4, No.3 (2003 June)▼d2004, 06
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS014502▼b60055341▼h8▼s2▼fP
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