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Etching Characteristics of YMnO3 Thin Films in Cl Based Inductively Coupled Plasma
Etching Characteristics of YMnO3 Thin Films in Cl Based Inductively Coupled Plasma
Detailed Information
- Material Type
- 기사
- ISSN
- 12297607
- Author
- Dong Pyo Kim
- Title/Author
- Etching Characteristics of YMnO3 Thin Films in Cl Based Inductively Coupled Plasma / Dong Pyo Kim ; Chang Il Kim
- Publish Info
- 서울 : 한국전기전자재료학회, 2004.
- Material Info
- pp. 29-34
- General Note
- Includes Bibliography
- Added Entry-Personal Name
- Chang Il Kim
- Host Item Entry
- Transactions on Electrical and Electronic Materials : Vol.4, No.2 (2003 April) 2004, 04
- Electronic Location and Access
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60232694
MARC
008190927s2004 ulk aa eng■022 ▼a12297607
■1001 ▼aDong Pyo Kim
■24510▼aEtching Characteristics of YMnO3 Thin Films in Cl Based Inductively Coupled Plasma▼dDong Pyo Kim ▼eChang Il Kim
■260 ▼a서울▼b한국전기전자재료학회▼c2004.
■300 ▼app. 29-34
■500 ▼aIncludes Bibliography
■7001 ▼aChang Il Kim
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.4, No.2 (2003 April)▼d2004, 04
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS014501▼b60055341▼h8▼s2▼fP
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