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Roles of Phosphoric Acid in Slurry for Cu and TaN CMP
Roles of Phosphoric Acid in Slurry for Cu and TaN CMP
Detailed Information
- 자료유형
- 기사
- ISSN
- 12297607
- 저자명
- Sang Yong Kim
- 서명/저자
- Roles of Phosphoric Acid in Slurry for Cu and TaN CMP / Sang Yong Kim , Jong Heun Lim , Chong Hee Yu , Nam Hoon Kim , Eui Goo Chang
- 발행사항
- 서울 : 한국전기전자재료학회, 2004.
- 형태사항
- pp. 1-4
- 주기사항
- Includes Bibliography
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60232687
MARC
008190927s2004 ulk aa eng■022 ▼a12297607
■1001 ▼aSang Yong Kim
■24510▼aRoles of Phosphoric Acid in Slurry for Cu and TaN CMP▼dSang Yong Kim ▼e Jong Heun Lim , Chong Hee Yu , Nam Hoon Kim , Eui Goo Chang
■260 ▼a서울▼b한국전기전자재료학회▼c2004.
■300 ▼app. 1-4
■500 ▼aIncludes Bibliography
■7001 ▼aJong Heun Lim , Chong Hee Yu , Nam Hoon Kim , Eui Goo Chang
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.4, No.2 (2003 April)▼d2004, 04
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS014501▼b60055341▼h8▼s2▼fP
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