서브메뉴
검색
Reproducible Chemical Mechanical Polishing Characteristics of Shallow Trench Isolation Structure using High Selectivity Slurry
Reproducible Chemical Mechanical Polishing Characteristics of Shallow Trench Isolation Structure using High Selectivity Slurry
Detailed Information
- Material Type
- 기사
- ISSN
- 12297607
- Author
- So Young Jeong
- Title/Author
- Reproducible Chemical Mechanical Polishing Characteristics of Shallow Trench Isolation Structure using High Selectivity Slurry / So Young Jeong ; Yong Jin Seo , Sang Yong Kim
- Publish Info
- 서울 : 한국전기전자재료학회, 2003.
- Material Info
- pp. 5-9
- General Note
- Includes Bibliography
- Added Entry-Personal Name
- Yong Jin Seo , Sang Yong Kim
- Host Item Entry
- Transactions on Electrical and Electronic Materials : Vol.3, No.4 (2002 December) 2003, 12
- Electronic Location and Access
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60232668
MARC
008190927s2003 ulk aa eng■022 ▼a12297607
■1001 ▼aSo Young Jeong
■24510▼aReproducible Chemical Mechanical Polishing Characteristics of Shallow Trench Isolation Structure using High Selectivity Slurry▼dSo Young Jeong ▼eYong Jin Seo , Sang Yong Kim
■260 ▼a서울▼b한국전기전자재료학회▼c2003.
■300 ▼app. 5-9
■500 ▼aIncludes Bibliography
■7001 ▼aYong Jin Seo , Sang Yong Kim
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.3, No.4 (2002 December)▼d2003, 12
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS014499▼b60055341▼h8▼s2▼fP
Preview
Export
ChatGPT Discussion
AI Recommended Related Books
Detail Info.
- Reservation
- Not Exist
- My Folder
- Reference Materials for Thesis Writing
- Reference Materials for Research Ethics
- Job-Related Books
