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Failure Analysis for High via Resistance by HDP CVD System for IMD Layer
Failure Analysis for High via Resistance by HDP CVD System for IMD Layer
Detailed Information
- Material Type
- 기사
- ISSN
- 12297607
- Author
- Sang Yong Kim
- Title/Author
- Failure Analysis for High via Resistance by HDP CVD System for IMD Layer / Sang Yong Kim ; Hun Sang Chung , Yong Jin Seo
- Publish Info
- 서울 : 한국전기전자재료학회, 2003.
- Material Info
- pp. 1-4
- General Note
- Includes Bibliography
- Added Entry-Personal Name
- Hun Sang Chung , Yong Jin Seo
- Host Item Entry
- Transactions on Electrical and Electronic Materials : Vol.3, No.4 (2002 December) 2003, 12
- Electronic Location and Access
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60232667
MARC
008190927s2003 ulk aa eng■022 ▼a12297607
■1001 ▼aSang Yong Kim
■24510▼aFailure Analysis for High via Resistance by HDP CVD System for IMD Layer▼dSang Yong Kim▼eHun Sang Chung , Yong Jin Seo
■260 ▼a서울▼b한국전기전자재료학회▼c2003.
■300 ▼app. 1-4
■500 ▼aIncludes Bibliography
■7001 ▼aHun Sang Chung , Yong Jin Seo
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.3, No.4 (2002 December)▼d2003, 12
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS014499▼b60055341▼h8▼s2▼fP
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