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Measurements of Developed Patterns by Direct Writing of Electron Beam on Different Materials underneath PMMA
Measurements of Developed Patterns by Direct Writing of Electron Beam on Different Materials underneath PMMA
상세정보
- 자료유형
- 기사
- ISSN
- 12297607
- 저자명
- Won Chae Jung
- 서명/저자
- Measurements of Developed Patterns by Direct Writing of Electron Beam on Different Materials underneath PMMA / Won Chae Jung
- 발행사항
- 서울 : 한국전기전자재료학회, 2003.
- 형태사항
- pp. 1-6
- 주기사항
- Includes Bibliography
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60232653
MARC
008190927s2003 ulk aa eng■022 ▼a12297607
■1001 ▼aWon Chae Jung
■24510▼aMeasurements of Developed Patterns by Direct Writing of Electron Beam on Different Materials underneath PMMA▼dWon Chae Jung
■260 ▼a서울▼b한국전기전자재료학회▼c2003.
■300 ▼app. 1-6
■500 ▼aIncludes Bibliography
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.3, No.3 (2002 September)▼d2003, 09
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS014498▼b60055341▼h8▼s2▼fP
