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Regular paper : Fabrication Technology of the Focusing Grating Coupler using Single - step Electron Beam Lithography
Regular paper : Fabrication Technology of the Focusing Grating Coupler using Single - step Electron Beam Lithography
Detailed Information
- 자료유형
- 기사
- ISSN
- 12297607
- 저자명
- Tae Youb Kim
- 서명/저자
- Regular paper : Fabrication Technology of the Focusing Grating Coupler using Single - step Electron Beam Lithography / Tae Youb Kim , Yark Yeon Kim , Gee Pyeong Han , Mun Cheol Paek , Hae Sung Kim , Byeong Ok Lim , Sung Chan Kim , Dong Hoon Shin , Jin Koo Rhee
- 발행사항
- 서울 : 한국전기전자재료학회, 2003.
- 형태사항
- pp. 30-37
- 주기사항
- Includes Bibliography
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60232621
MARC
008190927s2003 ulk aa eng■022 ▼a12297607
■1001 ▼aTae Youb Kim
■24510▼aRegular paper : Fabrication Technology of the Focusing Grating Coupler using Single - step Electron Beam Lithography▼dTae Youb Kim▼eYark Yeon Kim , Gee Pyeong Han , Mun Cheol Paek , Hae Sung Kim , Byeong Ok Lim , Sung Chan Kim , Dong Hoon Shin , Jin Koo Rhee
■260 ▼a서울▼b한국전기전자재료학회▼c2003.
■300 ▼app. 30-37
■500 ▼aIncludes Bibliography
■7001 ▼aYark Yeon Kim , Gee Pyeong Han , Mun Cheol Paek , Hae Sung Kim , Byeong Ok Lim , Sung Chan Kim , Dong Hoon Shin , Jin Koo Rhee
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.3, No.1 (2002 March)▼d2003, 03
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS014496▼b60055341▼h8▼s2
