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A Study on Characterization and Modeling of Shallow Trench Isolation in Oxide Chemical Mechanical Polishing
A Study on Characterization and Modeling of Shallow Trench Isolation in Oxide Chemical Mechanical Polishing
Detailed Information
- Material Type
- 기사
- ISSN
- 12297607
- Author
- Sang Yong Kim
- Title/Author
- A Study on Characterization and Modeling of Shallow Trench Isolation in Oxide Chemical Mechanical Polishing / Sang Yong Kim ; Hun Sang Chung
- Publish Info
- 서울 : 한국전기전자재료학회, 2002.
- Material Info
- pp. 24-27
- General Note
- Includes Bibliography
- Added Entry-Personal Name
- Hun Sang Chung
- Host Item Entry
- Transactions on Electrical and Electronic Materials : Vol.2, No.3 (2001 September) 2002, 09
- Electronic Location and Access
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60232598
MARC
008190927s2002 ulk aa eng■022 ▼a12297607
■1001 ▼aSang Yong Kim
■24510▼aA Study on Characterization and Modeling of Shallow Trench Isolation in Oxide Chemical Mechanical Polishing▼dSang Yong Kim▼eHun Sang Chung
■260 ▼a서울▼b한국전기전자재료학회▼c2002.
■300 ▼app. 24-27
■500 ▼aIncludes Bibliography
■7001 ▼aHun Sang Chung
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.2, No.3 (2001 September)▼d2002, 09
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS014494▼b60055341▼h8▼s2▼fP
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