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A Study on Characterization and Modeling of Shallow Trench Isolation in Oxide Chemical Mechanical Polishing
A Study on Characterization and Modeling of Shallow Trench Isolation in Oxide Chemical Mechanical Polishing
Detailed Information
- 자료유형
- 기사
- ISSN
- 12297607
- 저자명
- Sang Yong Kim
- 서명/저자
- A Study on Characterization and Modeling of Shallow Trench Isolation in Oxide Chemical Mechanical Polishing / Sang Yong Kim , Hun Sang Chung
- 발행사항
- 서울 : 한국전기전자재료학회, 2002.
- 형태사항
- pp. 24-27
- 주기사항
- Includes Bibliography
- 기타저자
- Hun Sang Chung
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60232598
MARC
008190927s2002 ulk aa eng■022 ▼a12297607
■1001 ▼aSang Yong Kim
■24510▼aA Study on Characterization and Modeling of Shallow Trench Isolation in Oxide Chemical Mechanical Polishing▼dSang Yong Kim▼eHun Sang Chung
■260 ▼a서울▼b한국전기전자재료학회▼c2002.
■300 ▼app. 24-27
■500 ▼aIncludes Bibliography
■7001 ▼aHun Sang Chung
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.2, No.3 (2001 September)▼d2002, 09
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS014494▼b60055341▼h8▼s2▼fP
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