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Simulation of Material Properties of Amorphous Carbon Nitride with Non - uniform Nitrogen Distribution
Simulation of Material Properties of Amorphous Carbon Nitride with Non - uniform Nitrogen Distribution
Detailed Information
- 자료유형
- 기사
- ISSN
- 12297607
- 저자명
- Y . F . Lu
- 서명/저자
- Simulation of Material Properties of Amorphous Carbon Nitride with Non - uniform Nitrogen Distribution / Y . F . Lu , Z . F . He
- 발행사항
- 서울 : 한국전기전자재료학회, 2002.
- 형태사항
- pp. 1-6
- 주기사항
- Includes Bibliography
- 기타저자
- Z . F . He
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60232591
MARC
008190927s2002 ulk aa eng■022 ▼a12297607
■1001 ▼aY . F . Lu
■24510▼aSimulation of Material Properties of Amorphous Carbon Nitride with Non - uniform Nitrogen Distribution▼dY . F . Lu▼eZ . F . He
■260 ▼a서울▼b한국전기전자재료학회▼c2002.
■300 ▼app. 1-6
■500 ▼aIncludes Bibliography
■7001 ▼aZ . F . He
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.2, No.3 (2001 September)▼d2002, 09
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS014494▼b60055341▼h8▼s2▼fP
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