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Regular Paper : The Effect of Pyrazine on TMAH : IPA Single - crystal Silicon Anisotropic Etching Properties
Regular Paper : The Effect of Pyrazine on TMAH : IPA Single - crystal Silicon Anisotropic Etching Properties
Detailed Information
- Material Type
- 기사
- ISSN
- 12297607
- Author
- Gwiy Sang Chung
- Title/Author
- Regular Paper : The Effect of Pyrazine on TMAH : IPA Single - crystal Silicon Anisotropic Etching Properties / Gwiy Sang Chung ; Tae Song Kim , Won Jae Lee , Jae Sung Song
- Publish Info
- 서울 : 한국전기전자재료학회, 2002.
- Material Info
- pp. 21-25
- General Note
- Includes Bibliography
- Added Entry-Personal Name
- Tae Song Kim , Won Jae Lee , Jae Sung Song
- Host Item Entry
- Transactions on Electrical and Electronic Materials : Vol.2, No.2 (2001 June) 2002, 06
- Electronic Location and Access
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60232585
MARC
008190927s2002 ulk aa eng■022 ▼a12297607
■1001 ▼aGwiy Sang Chung
■24510▼aRegular Paper : The Effect of Pyrazine on TMAH : IPA Single - crystal Silicon Anisotropic Etching Properties▼dGwiy Sang Chung▼eTae Song Kim , Won Jae Lee , Jae Sung Song
■260 ▼a서울▼b한국전기전자재료학회▼c2002.
■300 ▼app. 21-25
■500 ▼aIncludes Bibliography
■7001 ▼aTae Song Kim , Won Jae Lee , Jae Sung Song
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.2, No.2 (2001 June)▼d2002, 06
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS014493▼b60055341▼h8▼s2▼fP
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