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ITO Thin Film Ablation Using KrF Excimer Laser and its Characteristics
ITO Thin Film Ablation Using KrF Excimer Laser and its Characteristics
Detailed Information
- Material Type
- 기사
- ISSN
- 12297607
- Author
- Kyoung Cheol Lee
- Title/Author
- ITO Thin Film Ablation Using KrF Excimer Laser and its Characteristics / Kyoung Cheol Lee ; Yong Feng Lu , Cheon Lee
- Publish Info
- 서울 : 한국전기전자재료학회, 2001.
- Material Info
- pp. 20-24
- General Note
- Includes Bibliography
- Added Entry-Personal Name
- Yong Feng Lu , Cheon Lee
- Host Item Entry
- Transactions on Electrical and Electronic Materials : Vol.1, No.4 (2000 December) 2001, 12
- Electronic Location and Access
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60232551
MARC
008190927s2001 ulk aa eng■022 ▼a12297607
■1001 ▼aKyoung Cheol Lee
■24510▼aITO Thin Film Ablation Using KrF Excimer Laser and its Characteristics▼dKyoung Cheol Lee▼eYong Feng Lu , Cheon Lee
■260 ▼a서울▼b한국전기전자재료학회▼c2001.
■300 ▼app. 20-24
■500 ▼aIncludes Bibliography
■7001 ▼aYong Feng Lu , Cheon Lee
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.1, No.4 (2000 December)▼d2001, 12
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS014491▼b60055341▼h8▼s2▼fP
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