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Regular Paper / Characterization of Helicon Plasma by H2 Gas Discharge and Fabrication of Diamond Thin Films
Regular Paper / Characterization of Helicon Plasma by H2 Gas Discharge and Fabrication of Diamond Thin Films
Detailed Information
- 자료유형
- 기사
- ISSN
- 12297607
- 저자명
- June Won Hyun
- 서명/저자
- Regular Paper / Characterization of Helicon Plasma by H2 Gas Discharge and Fabrication of Diamond Thin Films / June Won Hyun , Yong Jin Kim , Seung Jeong Noh
- 발행사항
- 서울 : 한국전기전자재료학회, 2001.
- 형태사항
- pp. 12-17
- 주기사항
- Includes Bibliography
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60232514
MARC
008190927s2001 ulk aa eng■022 ▼a12297607
■1001 ▼aJune Won Hyun
■24510▼aRegular Paper / Characterization of Helicon Plasma by H2 Gas Discharge and Fabrication of Diamond Thin Films▼dJune Won Hyun▼eYong Jin Kim , Seung Jeong Noh
■260 ▼a서울▼b한국전기전자재료학회▼c2001.
■300 ▼app. 12-17
■500 ▼aIncludes Bibliography
■7001 ▼aYong Jin Kim , Seung Jeong Noh
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.1, No.2 (2000 June)▼d2001, 06
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS014489▼b60055341▼h8▼s2▼fP
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