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Regular Paper / A Study on Pumping Effect of Oxygen in Polysilicon Gate Etching
Regular Paper / A Study on Pumping Effect of Oxygen in Polysilicon Gate Etching
Detailed Information
- Material Type
- 기사
- ISSN
- 12297607
- Author
- Nam Hoon Kim
- Title/Author
- Regular Paper / A Study on Pumping Effect of Oxygen in Polysilicon Gate Etching / Nam Hoon Kim ; Sung Wook Shin , Seok Bin Yu , Chang Il Kim , Eui Goo Chang
- Publish Info
- 서울 : 한국전기전자재료학회, 2001.
- Material Info
- pp. 1-6
- General Note
- Includes Bibliography
- Added Entry-Personal Name
- Sung Wook Shin , Seok Bin Yu , Chang Il Kim , Eui Goo Chang
- Host Item Entry
- Transactions on Electrical and Electronic Materials : Vol.1, No.2 (2000 June) 2001, 06
- Electronic Location and Access
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60232511
MARC
008190927s2001 ulk aa eng■022 ▼a12297607
■1001 ▼aNam Hoon Kim
■24510▼aRegular Paper / A Study on Pumping Effect of Oxygen in Polysilicon Gate Etching▼dNam Hoon Kim ▼e Sung Wook Shin , Seok Bin Yu , Chang Il Kim , Eui Goo Chang
■260 ▼a서울▼b한국전기전자재료학회▼c2001.
■300 ▼app. 1-6
■500 ▼aIncludes Bibliography
■7001 ▼aSung Wook Shin , Seok Bin Yu , Chang Il Kim , Eui Goo Chang
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.1, No.2 (2000 June)▼d2001, 06
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS014489▼b60055341▼h8▼s2▼fP
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