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Fatigue Characteristics of PZT Thin Films Deposited by ECR-PECVD
Fatigue Characteristics of PZT Thin Films Deposited by ECR-PECVD
Detailed Information
- 자료유형
- 기사
- ISSN
- 12297607
- 저자명
- Su Ock Chung
- 서명/저자
- Fatigue Characteristics of PZT Thin Films Deposited by ECR-PECVD / Su Ock Chung , Won Jong Lee
- 발행사항
- 서울 : 한국전기전자재료학회, 2005.
- 형태사항
- pp. 177-185
- 주기사항
- Includes Bibliography
- 기타저자
- Won Jong Lee
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60232206
MARC
008190926s2005 ulk aa eng■022 ▼a12297607
■1001 ▼aSu Ock Chung
■24510▼aFatigue Characteristics of PZT Thin Films Deposited by ECR-PECVD▼d Su Ock Chung ▼eWon Jong Lee
■260 ▼a서울▼b한국전기전자재료학회▼c2005.
■300 ▼app. 177-185
■500 ▼aIncludes Bibliography
■7001 ▼aWon Jong Lee
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.6, No.4 (2005 August)▼d2005, 08
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS016399▼b60055341▼h8▼s2▼fP
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