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Polishing Mechanism of TEOS-CMP with High-temperature Slurry by Surface Analysis
Polishing Mechanism of TEOS-CMP with High-temperature Slurry by Surface Analysis
상세정보
- 자료유형
- 기사
- ISSN
- 12297607
- 저자명
- Nam Hoon Kim
- 서명/저자
- Polishing Mechanism of TEOS-CMP with High-temperature Slurry by Surface Analysis / Nam Hoon Kim , Yong Jin Seo , Pil Ju Ko , Woo Sun Lee
- 발행사항
- 서울 : 한국전기전자재료학회, 2005.
- 형태사항
- pp. 164-168
- 주기사항
- Includes Bibliography
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60232202
MARC
008190926s2005 ulk aa eng■022 ▼a12297607
■1001 ▼aNam Hoon Kim
■24510▼aPolishing Mechanism of TEOS-CMP with High-temperature Slurry by Surface Analysis▼d Nam Hoon Kim ▼eYong Jin Seo , Pil Ju Ko , Woo Sun Lee
■260 ▼a서울▼b한국전기전자재료학회▼c2005.
■300 ▼app. 164-168
■500 ▼aIncludes Bibliography
■7001 ▼aYong Jin Seo , Pil Ju Ko , Woo Sun Lee
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.6, No.4 (2005 August)▼d2005, 08
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS016399▼b60055341▼h8▼s2▼fP
