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Room Temperature Preparation of Poly-Si Thin Films by IBE with Substrate Bias Method
Room Temperature Preparation of Poly-Si Thin Films by IBE with Substrate Bias Method
Detailed Information
- Material Type
- 기사
- ISSN
- 12297607
- Author
- Byung Yoon Chu
- Title/Author
- Room Temperature Preparation of Poly-Si Thin Films by IBE with Substrate Bias Method / Byung Yoon Chu ; Sung Chae Yang , Byoung Sung Han , Jung Hui Lee , Kiyoshi Yatsui
- Publish Info
- 서울 : 한국전기전자재료학회, 2005.
- Material Info
- pp. 57-62
- General Note
- Includes Bibliography
- Added Entry-Personal Name
- Sung Chae Yang , Byoung Sung Han , Jung Hui Lee , Kiyoshi Yatsui
- Host Item Entry
- Transactions on Electrical and Electronic Materials : Vol.6, No.2 (2005 April) 2005, 04
- Electronic Location and Access
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60232168
MARC
008190926s2005 ulk aa eng■022 ▼a12297607
■1001 ▼aByung Yoon Chu
■24510▼aRoom Temperature Preparation of Poly-Si Thin Films by IBE with Substrate Bias Method▼dByung Yoon Chu ▼eSung Chae Yang , Byoung Sung Han , Jung Hui Lee , Kiyoshi Yatsui
■260 ▼a서울▼b한국전기전자재료학회▼c2005.
■300 ▼app. 57-62
■500 ▼aIncludes Bibliography
■7001 ▼aSung Chae Yang , Byoung Sung Han , Jung Hui Lee , Kiyoshi Yatsui
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.6, No.2 (2005 April)▼d2005, 04
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS014513▼b60055341▼h8▼s2▼fP
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