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Room Temperature Preparation of Poly-Si Thin Films by IBE with Substrate Bias Method
Room Temperature Preparation of Poly-Si Thin Films by IBE with Substrate Bias Method
상세정보
- 자료유형
- 기사
- ISSN
- 12297607
- 저자명
- Byung Yoon Chu
- 서명/저자
- Room Temperature Preparation of Poly-Si Thin Films by IBE with Substrate Bias Method / Byung Yoon Chu , Sung Chae Yang , Byoung Sung Han , Jung Hui Lee , Kiyoshi Yatsui
- 발행사항
- 서울 : 한국전기전자재료학회, 2005.
- 형태사항
- pp. 57-62
- 주기사항
- Includes Bibliography
- 원문정보
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60232168
MARC
008190926s2005 ulk aa eng■022 ▼a12297607
■1001 ▼aByung Yoon Chu
■24510▼aRoom Temperature Preparation of Poly-Si Thin Films by IBE with Substrate Bias Method▼dByung Yoon Chu ▼eSung Chae Yang , Byoung Sung Han , Jung Hui Lee , Kiyoshi Yatsui
■260 ▼a서울▼b한국전기전자재료학회▼c2005.
■300 ▼app. 57-62
■500 ▼aIncludes Bibliography
■7001 ▼aSung Chae Yang , Byoung Sung Han , Jung Hui Lee , Kiyoshi Yatsui
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.6, No.2 (2005 April)▼d2005, 04
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS014513▼b60055341▼h8▼s2▼fP
