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Dishing and Erosion Evaluations of Tungsten CMP Slurry in the Orbital Polishing System
Dishing and Erosion Evaluations of Tungsten CMP Slurry in the Orbital Polishing System
Detailed Information
- Material Type
- 기사
- ISSN
- 12297607
- Author
- Sang Ho Lee
- Title/Author
- Dishing and Erosion Evaluations of Tungsten CMP Slurry in the Orbital Polishing System / Sang Ho Lee ; 공저 Young Jae Kang , Jin Goo Park , Pan Ki Kwon , Chang Il Kim , Chan Kwon Oh , Soo Myoung Kim , Myung S. Jhon , Sean Hur , Young Jung Kim , Bong Ho Kim
- Publish Info
- 서울 : 한국전기전자재료학회, 2007.
- Material Info
- pp. 163-166
- General Note
- 참고문헌 수록
- Added Entry-Personal Name
- Young Jae Kang , Jin Goo Park , Pan Ki Kwon , Chang Il Kim , Chan Kwon Oh , Soo Myoung Kim , Myung S. Jhon , Sean Hur , Young Jung Kim , Bong Ho Kim
- Host Item Entry
- Transactions on Electrical and Electronic Materials : Vol.7, No.4 (2006 August) 2007, 08
- Electronic Location and Access
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60230068
MARC
008190725s2007 ulk aa eng■022 ▼a12297607
■1001 ▼aSang Ho Lee
■24510▼aDishing and Erosion Evaluations of Tungsten CMP Slurry in the Orbital Polishing System▼dSang Ho Lee ▼e공저 Young Jae Kang , Jin Goo Park , Pan Ki Kwon , Chang Il Kim , Chan Kwon Oh , Soo Myoung Kim , Myung S. Jhon , Sean Hur , Young Jung Kim , Bong Ho Kim
■260 ▼a서울▼b한국전기전자재료학회▼c2007.
■300 ▼app. 163-166
■500 ▼a참고문헌 수록
■7001 ▼aYoung Jae Kang , Jin Goo Park , Pan Ki Kwon , Chang Il Kim , Chan Kwon Oh , Soo Myoung Kim , Myung S. Jhon , Sean Hur , Young Jung Kim , Bong Ho Kim
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.7, No.4 (2006 August)▼d2007, 08
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS036831▼b60055341▼h8▼s2▼fP
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