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Consumable Approaches of Polysilicon MEMS CMP
Consumable Approaches of Polysilicon MEMS CMP
Detailed Information
- Material Type
- 기사
- ISSN
- 12297607
- Author
- Sung Min Park
- Title/Author
- Consumable Approaches of Polysilicon MEMS CMP / Sung Min Park ; 공저 Suk Hoon Jeong , Moon Ki Jeong , Boum Young Park , Hae Do Jeong , Hyoung Jae Kim
- Publish Info
- 서울 : 한국전기전자재료학회, 2007.
- Material Info
- pp. 157-162
- General Note
- 참고문헌 수록
- Added Entry-Personal Name
- Suk Hoon Jeong , Moon Ki Jeong , Boum Young Park , Hae Do Jeong , Hyoung Jae Kim
- Host Item Entry
- Transactions on Electrical and Electronic Materials : Vol.7, No.4 (2006 August) 2007, 08
- Electronic Location and Access
- url
- 모체레코드
- 모체정보확인
- Control Number
- kjul:60230067
MARC
008190725s2007 ulk aa eng■022 ▼a12297607
■1001 ▼aSung Min Park
■24510▼aConsumable Approaches of Polysilicon MEMS CMP▼dSung Min Park▼e공저 Suk Hoon Jeong , Moon Ki Jeong , Boum Young Park , Hae Do Jeong , Hyoung Jae Kim
■260 ▼a서울▼b한국전기전자재료학회▼c2007.
■300 ▼app. 157-162
■500 ▼a참고문헌 수록
■7001 ▼aSuk Hoon Jeong , Moon Ki Jeong , Boum Young Park , Hae Do Jeong , Hyoung Jae Kim
■773 ▼tTransactions on Electrical and Electronic Materials▼gVol.7, No.4 (2006 August)▼d2007, 08
■856 ▼uhttp://www.kieeme.or.kr
■SIS ▼aS036831▼b60055341▼h8▼s2▼fP
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